The Gaseous Electronics Conference RF Reference Cell - An Introduction
نویسندگان
چکیده
منابع مشابه
The Gaseous Electronics Conference RF Reference Cell—An Introduction
This paper provides an introduction to the Gaseous Electronics Conference (GEC) RF Reference Cell, and to the articles published in this Special Issue of the Journal of Research of the National Institute of Standards and Technology. A brief summary of the history and purpose of the Reference Cell concept is presented, and recent changes to the GEC Cell design are documented. The paper concludes...
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In order to extend the operating range of the GEC RF Reference Cell, we developed an inductively coupled plasma source that replaced the standard parallel-plate upper-electrode assembly. Voltage and current probes, Langmuir probes, and an 80 GHz interferometer provided information on plasmas formed in argon, chlorine, and nitrogen at pressures from 0.1 Pa to 3 Pa. For powers deposited in the pl...
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A review is presented of kinetic-energy distribution measurements for ions striking grounded surfaces in a Gaseous Electronics Conference (GEC) rf Reference Cell. Two experimental arrangements that have been used to measure ion energies in the GEC Cell are described, and a comparison of their performance under different operating conditions is presented. Significant results from ion-energy anal...
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A review of the one-dimensional modeling studies in the literature of the Gaseous Electronics Conference (GEC) reference plasma reactor is presented. Most of the studies are based on the fluid model description of the discharge and some utilize hybrid fluid-kinetic schemes. Both models are discussed here briefly. The models provide a basic understanding of the discharge mechanisms and reproduce...
متن کاملOptical Emission Spectroscopy on the Gaseous Electronics Conference RF Reference Cell
A summary of the experimental observations of the optical emission from the Gaseous Electronics Conference (GEC) rf Reference Cell plasma will be discussed. Spatially and temporally resolved results are provided for various reference and non-reference conditions, including etching type plasmas. These measurements provide a detailed description of the temporal evolution of optical emission from ...
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ژورنال
عنوان ژورنال: Journal of Research of the National Institute of Standards and Technology
سال: 1995
ISSN: 1044-677X
DOI: 10.6028/jres.100.025